Arrayed waveguide grating in InP membrane on silicon patterned by 193-nm deep UV lithography

J.P. van Engelen, J. Bolk, X. Zhang, K.A. Williams, Y. Jiao, J.J.G.M. van der Tol
in the Proceedings of the 24th Annual Symposium of the IEEE Photonics Society Benelux Chapter, 21-22 November 2019, Vrije Universiteit, Amsterdam, The Netherlands.
Publication year: 2019

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