Abstract:

double-sided processing, as a fabrication technology dedicated for membrane photonics, gives rise to new design optimizations. This paper reports latest achievements of this processing scheme in an InP-membrane-on-silicon (IMOS) platform, with a focus on a high bandwidth (>6 Hz) photodetector. Furthermore, a novel integration platform based on the double-sided processing is proposed, to integrate high-performance building blocks in a single membrane layer, providing full photonic functionality.