L. Shen, Y. Jiao, A. Higuera Rodriguez, A. Millan Mejia, J. van der Tol, G. Roelkens, M. Smit
18th European Conference on Integrated Optics (ECIO 2016), 18-20 May 2016, Warsaw, Poland.
Publication year: 2016


double-sided processing, as a fabrication technology dedicated for membrane photonics, gives rise to new design optimizations. This paper reports latest achievements of this processing scheme in an InP-membrane-on-silicon (IMOS) platform, with a focus on a high bandwidth (>6 Hz) photodetector. Furthermore, a novel integration platform based on the double-sided processing is proposed, to integrate high-performance building blocks in a single membrane layer, providing full photonic functionality.

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