A. Higuera-Rodriguez, D. Heiss, Y. Jiao, M. Smit
18th European Conference on Integrated Optics (ECIO 2016), 18-20 May 2016, Warsaw, Poland.
Publication year: 2016

Abstract

In this article we present a technology process needed for membrane-based butt-joint waveguide-coupled 1D photonic crystal (PC) nanobeams (NBs). We discuss the results of etching experiments through different materials, chemistries and geometrical properties of the slabs to achieve high quality NBs.

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