A.J. Millan-Mejia, Y. Jiao, J.J.G.M. van der Tol, M.K. Smit
18th European Conference on Integrated Optics (ECIO 2016), 18-20 May 2016, Warsaw, Poland.
Publication year: 2016


For the InP Membranes On Silicon (IMOS) platform [1], we developed an electro-optic modulator based on a slot-waveguide with a high nonlinear polymer. A variety of fabrication techniques are used, including electron beam lithography (EBL), optical lithography (OL), dry etching and metallization. The fabrication of such modulator requires a complex fabrication process. In this work we present and discuss the most important fabrication steps.

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