L. Shen, Y. Jiao, W. Yao, Z. Cao, J.P. van Engelen, J.J.G.M. van der Tol,G. Roelkens and M.K. Smit
Optics Express, vol. 24, pp. 8290-8301, 2016.
Publication year: 2016


A uni-traveling carrier photodetector (UTC-PD), heterogeneously integrated on silicon, is demonstrated. It is fabricated in an InP-based photonic membrane bonded on a silicon wafer, using a novel double-sided processing scheme. A very high 3 dB bandwidth of beyond 67 GHz is obtained, together with a responsivity of 0.7 A/W at 1.55 μm wavelength. In addition, open eye diagrams at 54 Gb/s are observed. These results promise high speed applications using a novel full-functionality photonic platform on silicon.

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