L. Shen, P.J. van Veldhoven, Y. Jiao, V.M. Dolores Calzadilla, J.J.G.M. van der Tol, G.C. Roelkens and M.K. Smit
27th International Conference on Indium Phosphide and Related Materials (IPRM), 28 June – 2 July 2015, Santa Barbara, USA.
Publication year: 2015

Abstract:

Recent developments in membrane photonics promise enhanced performances for integrated devices and circuits [1]. One remaining technological challenge for membrane photonic devices lies in the n-type ohmic contacts on top of active devices. From the electrical point of view, the contact resistance needs to be minimized for devices with ever-smaller sizes to achieve high speed and low power consumption. Moreover, low optical loss from those metal contacts is required for devices integrated in a membrane with only submicron thickness.

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