A. Fiore, T. Liu, F. Pagliano, R. van Veldhoven, V. Pogoretskii, Y. Jiao
in the 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019), 23-26 July 2019, Lisbon Portugal. Invited Paper.
Publication year: 2019


We report integrated nano-opto-electromechanical systems consisting of coupled InP waveguides on a silicon
platform. Due to the tight optical confinement, large phase shifts are obtained over short propagation lengths,
enabling efficient switching at low voltages in a small footprint. Due to their large response to nanomechanical
displacements, they can also be applied as integrated displacement and force sensors.

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