Nanophotonic integration enabled by ultra-smooth plasma etching technique

Y. Jiao
SENTECH's seminar "Plasma Process Technology", 09 March 2017, Berlin-Adlershof, Germany.
Publication year: 2017

Invited talk at SENTECH seminar “Plasma Process Technology”, organized by SENTECH Instruments GmbH, 09 March 2017, Berlin-Adlershof, Germany.

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