L. Shen, S.P. Bhat, Y. Jiao, J.J.G.M. van der Tol, G.C. Roelkens, and M.K. Smit
17th European Conference on Integrated Optics (ECIO 2014), 24-27 Jun 2014, Nice, France.
Publication year: 2014


An InP membrane based waveguide photodetector is designed to reach a 3 dB bandwidth beyond 100 GHz. A uni-traveling-carrier (UTC) configuration is used for minimizing the carrier transit time. A novel double-side process technology is developed to enhance the bandwidth. In addition, a low resistance n-type contact technology is optimized to control the metal spiking into semiconductors.

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